发明名称 MEASURING INSTRUMENT
摘要 PROBLEM TO BE SOLVED: To provide a measuring instrument which makes only the measured object an object of measurement by eliminating error factors accompanying a moving mechanism for moving the measuring object. SOLUTION: The measuring instrument 1 has a body frame 3, extending in the vertical direction, a bottom plate 2 extending in the horizontal direction, an optical sensor 4 set to the body frame 3 to have an optical axis orthogonal to the vertical direction, a stage member 8 capable of holding the measured object 5, a guide rail 6 set to the body frame 3 so as to guide the stage member 8 in a direction orthogonal to the optical axis in the detection region of the optical sensor 4, the elevating mechanism 10 set to the bottom plate 2, so that a moving part 10b moves in the direction of approaching or separating from the optical sensor 4, and a working member 11 fixed to the moving part 10b of the moving mechanism 10 and having a contact ball 13, which can butt against the stage member 8. The working member 11 is constituted so that the contact ball 13 can be supported rotatably.
申请公布号 JP2002107131(A) 申请公布日期 2002.04.10
申请号 JP20000301723 申请日期 2000.10.02
申请人 SONY CHEM CORP 发明人 UCHIDA ATSUSHI
分类号 G01B11/26;G12B5/00;(IPC1-7):G01B11/26 主分类号 G01B11/26
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