发明名称 WORKING APPARATUS AND WORKING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a working apparatus and a working method in which working error caused by the thermal displacement of a working tool generated by heat generation associated with the drive of an actuator by performing the working by giving vibration to the working tool by the actuator are reduced, and the working accuracy and productivity are improved. SOLUTION: In performing the worming by giving vibration to the working tool 4 by driving the actuator of two drive systems 2a and 2b orthogonal to each other in a vibration-cutting unit 1, the heat generated by the drive of the actuator is reduced by circulating cooling refrigerant within the drive systems 2a and 2b by a cooling device 24. Temperature change of the drive systems 2a and 2b associated with heat generation by the drive of the actuator is measured by a plurality of temperature sensors 21 and detected by a temperature detector 20, the temperature information is fed back to the cooling device 24 via a control device 23, and the temperature and the flow rate of the refrigerant are controlled to correct the temperature. The working accuracy is improved by reducing the working error caused by the thermal displacement at a position of a blade tip of the working tool 4.
申请公布号 JP2002103102(A) 申请公布日期 2002.04.09
申请号 JP20000297872 申请日期 2000.09.29
申请人 CANON INC 发明人 KAMEI REI
分类号 B23Q11/12;B23B1/00;B23Q5/28;B23Q5/58;(IPC1-7):B23B1/00 主分类号 B23Q11/12
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