发明名称 CMOS image sensor and method for fabricating the same
摘要 A CMOS image sensor fabrication method that is capable of preventing a surface of a metal line from being damaged or contaminated is provided. The formed CMOS image sensor includes: a semiconductor structure, wherein the semiconductor structure includes a unit pixel area and a pad area; a metal line formed on the pad area, wherein a portion of the metal line is exposed; a passivation layer formed on the unit pixel area and on the metal line such that the exposed portion is left exposed; a planarized photoresist formed on a portion of the passivation layer; a micro-lens formed on a portion of the planarized photoresist; and an oxide layer formed on the entire formed structure such that the exposed portion is left exposed.
申请公布号 US6369417(B1) 申请公布日期 2002.04.09
申请号 US20010931119 申请日期 2001.08.16
申请人 HYUNDAI ELECTRONICS INDUSTRIES CO., LTD. 发明人 LEE JU-IL
分类号 H01L27/14;H01L27/146;H01L31/02;H01L31/0232;H01L31/10;H04N5/335;H04N5/369;H04N5/374;(IPC1-7):H01L31/062;H01L31/113;H01L31/023 主分类号 H01L27/14
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