发明名称 |
Surface acoustic wave device and method for manufacturing the same |
摘要 |
A surface acoustic wave device includes a piezoelectric plate and at least one interdigital electrode provided on the piezoelectric plate. The interdigital electrode includes a first metallic thin film and a second metallic thin film laminated on the first metallic thin film and containing tantalum as a principal component, and at least a portion of the tantalum of the second metallic thin film is alpha-tantalum.
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申请公布号 |
US6369491(B1) |
申请公布日期 |
2002.04.09 |
申请号 |
US20000654114 |
申请日期 |
2000.08.31 |
申请人 |
MURATA MANUFACTURING CO., LTD. |
发明人 |
NAKAGAWA MASATOSHI;TOSE MAKOTO;KOSHIDO YOSHIHIRO;KADOTA MICHIO;YONEDA TOSHIMARO;NAKAO TAKESHI |
分类号 |
H03H9/145;H03H3/08;H03H9/02;(IPC1-7):H03H9/15 |
主分类号 |
H03H9/145 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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