METHOD AND EQUIPMENT FOR SUPPLYING OZONE WATER

摘要

PROBLEM TO BE SOLVED: To provide a method and equipment for supplying ozone capable of effectively utilizing ozone water and pure water, and capable of reducing the amount of a TOC component such as a urea compound or the like in raw water when the raw water contains the TOC component. SOLUTION: The ozone supply equipment 10 is equipped with pure water making equipment 11 for making pure water from raw water, ozone water manufacturing equipment 12 for adding a predetermined amount of ozone to pure water to make ozone water, ozone washing equipment 15 for washing the surface of a silicon wafer with ozone water and an ozone water supply changeover apparatus 14 for changing over the supply destination of ozone water to the ozone washing equipment 15 or the pure water making equipment 11. When ozone washing is not performed, ozone water is guided to the mixing part 21 of the pure water making equipment 11 through an ozone water bypass piping 12B.