发明名称 |
Calibration target for electron beams |
摘要 |
A scattering target for use in a particle beam system is formed from a grid of gold on a substrate of carbon, with an intermediate smoothing layer (e.g. copper) on the carbon to provide a surface sufficiently smooth to provide an adequate target. An optional bonding layer may be used to improve adhesion between the gold and the smoothing layer.
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申请公布号 |
US6369396(B1) |
申请公布日期 |
2002.04.09 |
申请号 |
US19990408350 |
申请日期 |
1999.09.29 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
HARTLEY JOHN G.;GROVES TIMOTHY R.;KENDALL RODNEY A.;STURANS MARIS A. |
分类号 |
H01J37/02;H05H6/00;(IPC1-7):G03F9/00;G01N1/28 |
主分类号 |
H01J37/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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