| 摘要 |
PROBLEM TO BE SOLVED: To enhance dimensional accuracy of the gap between a diaphragm and each individual electrode. SOLUTION: A thermal oxide film 11 is formed on an electrode substrate 1 and then a recessed pattern having specified gradient and depth is formed. Subsequently, a titanium nitride film becoming an electrode material 12 is formed on the entire surface and patterned to leave an electrode 13 only in the recess. Since an insulation film is not required on the electrode 13, dimensions of a gap 16 can be controlled with high accuracy. When a diaphragm 3 is abutted against the electrode 13 and driven, an oxide film 21 is formed, at first, on the entire surface of a diaphragm substrate 2 by thermal oxidation. Subsequently, the electrode substrate part 30 and the diaphragm part 40 are bonded directly. Furthermore, a liquid chamber 4 is formed using the oxide film 21 formed on the diaphragm substrate 2 oppositely to the bonding face as a mask.
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