发明名称 |
Mask repair |
摘要 |
A method for repairing scalpel masks is described. In particular, opaque defects are repaired by milling with a gallium beam at a sufficient energy to ensure appropriate implantation of gallium into the membrane underlying the blocking material. Transparent defects are repaired using a gallium beam that impacts styrene gas in the vicinity of the defect to be repaired.
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申请公布号 |
US6368753(B1) |
申请公布日期 |
2002.04.09 |
申请号 |
US19990384395 |
申请日期 |
1999.08.27 |
申请人 |
AGERE SYSTEMS GUARDIAN CORP. |
发明人 |
HARRIOTT LLOYD RICHARD;NOVEMBRE ANTHONY EDWARD |
分类号 |
G03F1/08;G03F1/14;H01L21/027;(IPC1-7):G03F9/00 |
主分类号 |
G03F1/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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