| 摘要 |
Styrene derivatives of formula (1) are novel wherein R1 is hydrogen, C1-20 alkyl, fluoro-substituted C1-20 alkyl, chloro, or trichloromethyl, R2 is a phenol protecting group, p, q and r are integers in the range of 0<=p<5, 0<=q<5, 0<r<5, and 0<p+q<5.Polymers obtained by polymerizing the styrene derivatives are useful as the base polymer of resist compositions.
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