| 摘要 |
PROBLEM TO BE SOLVED: To provide a highly reliable inspection device and a drift correction method in the inspection device capable of executing accurate TDR measurement by executing correction based on the drift quantity to the TDR measurement value. SOLUTION: This device has a constitution having an initial bias calculation part 11 for determining an initial bias value of a measuring machine from the difference between the measurement value of a reference resistance measured by using the measuring machine and the true resistance value, a probe resistance calculation part 12 for determining the true resistance value of a probe by executing correction based on the initial bias value to the resistance value of the probe measured by using the measuring machine, a drift quantity detection part 13 for determining the drift quantity from the difference between the measurement value of the resistance of the probe outputted from the measuring machine when a prescribed condition is fulfilled and the true resistance value, and a correction part 14 for correcting, based on the drift quantity, the TDR measurement value measured by using the measuring machine.
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