SEMICONDUCTOR MANUFACTURING DEVICE

摘要

PROBLEM TO BE SOLVED: To design a gate valve for opening and closing an opening in an airtight chamber of a semiconductor manufacturing device to use uniaxial drive in opening and closing the opening, and reduce a space for the installation of the gate valve. SOLUTION: A driving base 24 and a valve element support board 32 are arranged for movement parallel to an opening face 2, and are urged in directions to interspace them. A valve element pressing link mechanism 45 is disposed between the driving base and the valve element support board, and is coupled with a valve element 36, which is movable perpendicularly to the valve element support board. Relative displacement between the driving base and the valve element support board causes the valve element pressing link mechanism to press the valve element against the opening.