MEASUREMENT METHOD AND DEVICE OF AMOUNT OF ADHESION OF METAL PHASE CONTAINED IN PLATED LAYER

摘要

PROBLEM TO BE SOLVED: To improve the measurement accuracy of the amount of adhesion of a metallic phase by improving X-ray diffraction intensity from the metallic phase contained in a plated layer in a method for measuring the amount of adhesion of the metallic phase contained in the plated layer using the X-ray diffraction method. SOLUTION: The X-ray intensity data are improved by measuring diffraction X rays from the metallic phase contained in the plated layer at a plurality of positions to the same Debey ring and integrating the obtained diffraction X-ray intensity data.