| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic heater which is optimal as a heater for heating semiconductor product for preventing the occurrence of a crack and separation in a protective layer, preventing generation of corrosive gas, such as ammonia and preventing a grain drop. SOLUTION: In this ceramic heater for forming a heating element on one surface or the inside of a ceramic substrate composed of a nonoxide ceramic plate-like body, the ceramic heater is characterized in that surface roughness of a ceramic substrate surface is Ra<=20μm, and the protective layer is formed at least in a part of the ceramic substrate.
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