SEMICONDUCTOR ACCELERATION SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor acceleration sensor having high sensitivity and high reliability in a low cost. SOLUTION: A sensing element 1 has a weight part 5 at a supporting part 16 supported capable of freely rocking through a deformation part 4, on which a gauge resistance 6 is formed. The sensing element 1 is connected with an upper cap 2 and a lower cap 3. On the upper cap 2 and the lower cap 3, recesses 2a and 3a are formed respectively on opposing surfaces against the sensing element 1. As for the upper cap 2, a resin entry preventing projection 17 is extended at a bottom surface of the recess 2a from a portion opposing both the deformation part 4 and the supporting part 16 toward the sensing element 1. As for the lower cap 3, a step part 18 is formed within the recess 3a for decreasing a distance between the step part 18 and a portion of the weight part 5 near the deformation part 4 compared with a distance between a bottom surface of the recess 3a and the weight part 5.