| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a suction collet which can easily correct the shift of rotation of a semiconductor pellet, and can always suck the semiconductor pellet in a right position for a suction face. SOLUTION: The suction collet 1 for retaining the semiconductor pellet 3 by suction has a pair of protrusions 16 and 16 placed parallel in the space as same as the width of the semiconductor pellet, or wider than that of the semiconductor pellet 3. A drawing hole 15 is provided between these protrusions 16 and 16. The semiconductor pellet 3 is guided and arbitrarily rotated by contacting both sides of the semiconductor pellet 3 to inside of these protrusions 16 and 16, and resulting the angle of the semiconductor pellet 3 to be adjusted to the right position.</p> |
