发明名称 SURFACE-ACOUSTIC WAVE DEVICE AND ITS MANUFACTURING METHOD
摘要 <p>PROBLEM TO BE SOLVED: To reduce in size a surface acoustic wave device, and to prevent the occurrence of a distortion in the surface acoustic wave device or a surface- acoustic wave element. SOLUTION: The method for manufacturing the surface-acoustic wave device comprises a first step of disposing a plurality of surface acoustic wave elements 20 on a mounting set substrate 40, so as to form a space between comb-like electrodes of the elements 20 and one surface of the substrate 40, and connecting the connecting electrodes of the elements 20 to conductor patterns of the substrate 40 by flip-chip bonding. The method further comprises a second step of disposing a sealing substrate 50 for counterposing the substrate 40 via the elements 20, and disposing a sealing material 51 between the substrate 40 and the substrate 50 around the elements 20 to seal the elements 20. The method also comprises a third step of cutting the substrate 40, the substrate 50 and the material 51 between the adjacent elements 20, and forming a plurality of the surface acoustic wave devices.</p>
申请公布号 JP2002100946(A) 申请公布日期 2002.04.05
申请号 JP20000290007 申请日期 2000.09.25
申请人 TDK CORP 发明人 MORIYA BUNJI;HAYASHI SHINICHIRO
分类号 H01L21/60;H03H3/08;H03H9/25;(IPC1-7):H03H3/08 主分类号 H01L21/60
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