| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a lift for a stage, which has improved rigidity for loads. SOLUTION: The lift for the stage has a bearing and lifting mechanism. The bearing supports the stage on a fixed member movably in the z axial direction, and the lift mechanism moves the stage in the z axial direction. The bearing is composed of an air-bearing which supports the stage movable in the Z axial direction with a compressed air by filling the compressed air into a small space between the stage and the fixed member.</p> |
