| 摘要 |
PROBLEM TO BE SOLVED: To properly detect as the abnormality of sensor output signal, the generation of short-circuit of a metal diaphragm and a bonding wire due to oil leak in a pressure sensor constituted by connecting a sensor chip for pressure detection and a terminal for external connection with wire bonding and sealing with a metal diaphragm by way of oil. SOLUTION: Among bonding wires 13a to 13c forming projection shape facing the metal diaphragm 34 between terminals 12a to 12c and the pad of a sensor chip 20, the top of the bonding wire 13a for signal output corresponding to the pad for signal output in the sensor chip 20 positions closer to the metal diaphragm 13 than the top of the other bonding wires 13b and 13c.
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