发明名称 MONITOR INSPECTION METHOD AND DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a monitor inspection method and a monitor inspection device for accurately and easily discriminating a plurality of inspection locations. SOLUTION: By displaying rows of bonding pads 76N, 76E, 76S, and 76W at the four locations of an IC package 70 on the corresponding first monitor 41, the second monitor 42, the third monitor 43, and the fourth monitor 44, respectively, and an inspector can inspect the same bonding pad row, easily discriminates the conformity, and inputs the conformity by judging devices 41A, 42A, 43A, and 44A at hand.
申请公布号 JP2002098647(A) 申请公布日期 2002.04.05
申请号 JP20000288688 申请日期 2000.09.22
申请人 IBIDEN CO LTD 发明人 ONO MASAHARU;TSUJI MASAHIRO
分类号 G01N21/956;G01N21/84;(IPC1-7):G01N21/956 主分类号 G01N21/956
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