LARGE SUBSTRATE INSPECTING APPARATUS

摘要

PROBLEM TO BE SOLVED: To achieve a smooth movement of a moving member and an accurate positioning thereof by reducing distortion generated during the movement of the moving member. SOLUTION: A first wire 27 is linked between the one direction side 25 in movement of a moving part 22a at one end of a moving member 22 and the other direction side 26 in movement of a moving part 22b at the other end of the moving member 22. A second wire 30 is linked between the other direction side 28 in movement of the moving part 22a at one end of the moving member 22 and one direction side 29 in movement of the moving part 22b at the other end of the moving member 22.