发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device which has a gate insulating film, having its reduction in dielectric strength suppressed. SOLUTION: In an element forming layer 3 on an SOI substrate 1, PchMOS 10 is insulated and separated, by being surrounded by a 1st trench 5, and NchMOS 20 is formed outside the 1st trench 5 side by side with the PchMOS 10 across the 1st trench 5. A gettering layer 7 is formed surrounding the NchMOS 20 and PchMOS 10, surrounded by the 1st trench 5 together, and the Nch MOS 20 and gettering layer 7 are adjacent to each other, across the element-forming layer 3. A 2nd trench 6 is formed outside the gettering layer 7.
申请公布号 JP2002100777(A) 申请公布日期 2002.04.05
申请号 JP20000285731 申请日期 2000.09.20
申请人 DENSO CORP 发明人 NAKAYAMA YOSHIAKI
分类号 C01B33/035;H01L21/322;H01L21/336;H01L21/76;H01L21/762;H01L21/8238;H01L27/08;H01L27/092;H01L27/12;H01L29/786;(IPC1-7):H01L29/786;H01L21/823 主分类号 C01B33/035
代理机构 代理人
主权项
地址