| 摘要 |
PROBLEM TO BE SOLVED: To provide a transfer device, a cartridge for transfer, and a transfer method which facilitate the alignment of an original disk and a substrate, can heat and cool the original disk and substrate in a short time, and make it easy to peel the substrate and original disk in nanoimprinting. SOLUTION: This transfer device has an original disk holding means 10 which holds an original disk 11 having a pattern corresponding to information, a substrate holding means 12 which holds a substrate 13 where the pattern of the original disk 11 is transferred, a fixing means which mutually fixes the original disk 11 and substrate 13, and a pressure applying means which applies pressure between the original disk 11 and substrate 13. The original disk holding means 10, substrate holding means 12, and fixing means can be attached to and detached from the pressure applying means as a single body.
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