| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a reflective sensor which detects a plate member housed in a case comprising a deep wall and copes with detection of both current- and next-generation semiconductor wafers. SOLUTION: Related to a reflective sensor 10, an irradiation region S1 of a light-projecting part 11 does not overlap a light-receiving region S2 of a light-receiving part 12, on a deep wall 53 of a case 52. Even if the light from the light-projecting part 11 is reflected on the deep wall 53 of the case 52, it is not received by the light-receiving part 12, allowing a next-generation wafer 50 to be stably detected as well.</p> |
