ELECTROSTATIC CHUCK AND ITS FABRICATION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a high quality and long life electrostatic chuck. SOLUTION: An electrostatic chuck which is for fixing a substrate to be treated by electrostatistic attraction in a vacuum treatment vessel. The chuck is provided with a thin film electrode (1) having a first plane in the side of the substrate to be treated, a second plane facing to the first plane, and an insulator layer (2) directly formed on the surface of the first thin film electrode (1). A part (2a) formed on the first plane of the above thin film electrode is composed of a polyimide layer.