发明名称 FIXED SHEET FOR DICING AND DICING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a fixed sheet for dicing, with which the generation of chipping in dicing can be prevented without lowering the yield of an object to be cut such as semiconductor wafer. SOLUTION: In the fixed sheet for dicing provided with an adhesive layer on a base material film, the fixed sheet for dicing is to be used, with which the base polymer of an adhesive agent forming the adhesive layer is a hot melt type thermoplastic resin and the storage elastic modulus of the adhesive layer is 1×106 to 1×109 Pa.
申请公布号 JP2002100587(A) 申请公布日期 2002.04.05
申请号 JP20000288218 申请日期 2000.09.22
申请人 NITTO DENKO CORP 发明人 YAMAMOTO MASASHI
分类号 H01L21/301;(IPC1-7):H01L21/301 主分类号 H01L21/301
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