| 摘要 |
PROBLEM TO BE SOLVED: To provide a rotary type multi-degree-of-freedom mechanism suitable for a visual inspection stage of a silicon wafer or a glass substrate for liquid crystal, a monitoring camera, a directional receiving and transmitting antenna or the like. SOLUTION: This mechanism has a strut 4 fixed to a base 2 with a flat upper face via a rotatably provided rotating base 3 and a pair of linear actuators 6 and 6 attached by joint means 5 and 5 which are revolute pairs respectively with two degrees of freedom. It is composed so as to support a member 9 to be adjusted via a joint means 7 which is a revolute pair with two degrees of freedom provided on an upper end part of the strut 4 and spherical bearings 8 and 8 which are revolute pairs respectively with three degrees of freedom provided on upper end sides of the pair of linear actuators 6 and 6.
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