| 摘要 |
The device for cleaning substrates (11) in liquid-phase environment comprises a number of elements assembled so as to form a chamber equipped with an acoustic window (7) fastened in the bottom part (1), a ring (2) for distributing liquids associated with a system (3) for supporting the substrates, the body (4) constituted by four vertical or inclined walls, an upper ring (5) for recovering liquids, and a lid (6). The cleaning function is activated by ultrasound, the circulation of liquids, rinsing and drying. The acoustic window (7) is made of quartz or metal so to transmit acoustic vibrations which can be in the range from 25 kHz to 6 MHz, and the generation of ultrasound is by piezoelectric transducers bonded to the lower surface of acoustic window and connected by a cable to a variable frequency generator. The generated ultrasonic waves are in the form of a vertical beam and specifically orientated. The device can comprise a hot plate fastened in the bottom part. The dimensions and inclinations of walls can be modified by replacing a modular element having the same fastening ring. The walls can be equipped with a window generating ultrasonic waves in the form of a horizontal beam and specifically orientated. The system for distributing liquids comprises a collector (8), pipes (9) and openings (10). |
