发明名称 METHOD FOR CORRECTING DEFECT IN GRAY TONE PART IN GRAY TONE MASK
摘要 PURPOSE: A correction method to easily correct defects in a gray tone part which are substantially difficult to be corrected by a conventional correction method is provided. CONSTITUTION: The method for correcting a defect in gray tone part comprises the followings that after a correction film(8) is formed in the region including a white defect, the correction film(8) is partially removed according to the form and/or arrangement which produces the gray tone effect equivalent to the normal pattern to form a correction pattern(3a' 3b') having mutually different widths and position from the normal pattern(3a,3b).
申请公布号 KR20020025843(A) 申请公布日期 2002.04.04
申请号 KR20010061012 申请日期 2001.09.29
申请人 HOYA CORPORATION 发明人 NAKAYAMA KENJI
分类号 G03F1/72;H01L21/027;H01L21/266 主分类号 G03F1/72
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