| 摘要 |
The invention relates to a testing device for determining a notch or cam position of a wafer. The device has a testing area for positioning at least one wafer (1) to be tested, said wafer comprising an edge (1a) and a notch (2) or cam which is mounted on said edge; a light source (4) which is positioned in such a way that it can illuminate the edge of the wafer (1); a first light sensor (8) which is positioned in such a way that it can receive the light (7) of the light source (4) that is reflected by the edge of the wafer (1); a second light sensor (11) which is positioned in such a way that it can receive the light (10) of the light source (4) that is reflected by the notch (2) or cam of the wafer (1) if the notch (2) or cam is located within a predetermined position range; and an evaluation unit which can determine whether a wafer is located in the testing area based on the light that is incident on the first light sensor (8) and which can determine whether the notch (2) or cam is located in the predetermined position range based on the light that is incident on the second light sensor (11).
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