Scattered light measurement unit has ellipsoidal mirror imaging onto detector scattered light distribution generated by diffracting projected light at surface of probe

摘要

The scattered light measurement unit includes an ellipsoidal mirror (1), which images continuously onto a detector (6) the scattered light distribution generated by diffracting the projected light at the surface topography of the probe (2). The detector includes light sensitive detection elements. A control electronic (7) for the detector, a control computer (8), a control unit (9) for the probe positioning unit (3) and a connection to a computer network (10) are also included.