MICRO ACTUATOR FOR OPTICAL SWITCH AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A micro actuator for an optical switch and a method for manufacturing the same are provided to operate a low voltage and rotate a reflecting mirror at 90 degrees. CONSTITUTION: The micro actuator for an optical switch includes a wafer(10). A lower electrode(20) is formed at an upper surface of the wafer(10). A side electrode(30) is formed at upper surface of the wafer(10) perpendicular to the lower electrode(20). A pair of support posts(50) protrudes away from the upper surface of the wafer(10) by a predetermined distance. A pair of distorting springs(60) face the lower electrode(20) and is located away from the side electrode(30) by a predetermined distance. The pair of distorting springs(60) rotatably support a reflecting mirror(40) by connecting between the reflecting mirror(40) and the support posts(50).