Ion source using UV/VUV light for ionisation has light source provided with electron gun separated by membrane from gas space in which light is generated by electron beam

摘要

The ion source has an ionisation chamber and a UV/VUV-excimer light source for generating ions by directing light into a sample gas. The light source is provided by a deuterium lamp, a micro hollow cathode lamp, a micro point lamp, a DC discharge lamp, a barrier discharge lamp, or an electron beam UV/VUV lamp, with an electron gun (1), a membrane (3) between the electron gun and a gas space (9) containing a rare earth gas or gas mixture and optical elements (11,12) for imaging the light emission volume into the ionisation space (14).