发明名称 SEMICONDUCTOR DEVICE AND TEST METHOD FOR MANUFACTURING THE SAME
摘要 <p>PURPOSE: Provided is a method for manufacturing a semiconductor device in which a generation of cracks at a bonding pad part due to probing in a chip test are prevented. CONSTITUTION: In the method for manufacturing the semiconductor device, a bonding pad(2) is formed using a first and second wiring layers. A plurality of slit-like ditches are arranged and provided between the first wiring layer and the second wiring layer. A long-length direction of connection part(15) corresponds to the moving direction of a probe for contacting the bonding pad.</p>
申请公布号 KR20020025777(A) 申请公布日期 2002.04.04
申请号 KR20010060089 申请日期 2001.09.27
申请人 NEC CORPORATION 发明人 ISHII JUNYA
分类号 H01L21/66;H01L21/3205;H01L21/60;H01L23/485;H01L23/52;(IPC1-7):H01L21/66 主分类号 H01L21/66
代理机构 代理人
主权项
地址