METHODS OF TESTING MATERIALS

摘要

The invention includes a method for testing materials, such as for example sputtering target materials, other materials for electronics applications, or other materials in general in which homogeneity throughout the material is desired. A plurality of positions are defined across at least a portion of a material. Sonic energy is sequentially irradiated across the plurality of positions. Echoes are induced by the sonic energy, and detected. At least some of the detected echoes are associated with individual positions of the plurality of positions that triggered the detected echoes. Information pertaining to at least one physical attribute of the detected echoes is processed to sort the detected echoes into a first goup indicative of inhomogeneities in the material, and a second group which does not indicate inhomogeneities in the material. The echoes of the first group are sorted into clusters, with the clusters being defined as echoes from adjacent positions of the plurality of positions. The separate echoes associated with a common cluster are analyzed and considered together to generate information about an inhomogeneity in the material