| 摘要 |
An interferometry system including: an interferometer which during operation directs a measurement beam along a measurement path contacting a measurement object and combines at least portion of the measurement beam with another beam to for an overlapping pair of exit beams, the interferometer including a beam steering assembly having a beam steering element and a positioning system to orient the beam steering element, the beam steering element positioned to direct the measurement beam, the measurement beam contacting the beam steering element; a control circuit which during operation causes the positioning system to reorient the beam steering element in response to a change in at least one of angular orientation and position of the measurement object; a photodetector; and an optical coupling an output beam derived from the overlapping pair of exit beams from the interferometer to the photodetector. |
