发明名称 A BALL FORMING PROCESS
摘要 <p>A ball forming process is for forming a ball (32) of metal on a metal wire (26) in a wire bonder (20). The process includes generating a glow discharge (11) between an electrode (4) and an end (5) of the metal wire (26) to form a ball (32) of metal at the end (5) and the wire (26). The ball is formed in a gaseous atmosphere comprising greater than 96 % by volume of nitrogen and substantially no hydrogen.</p>
申请公布号 WO0227781(A1) 申请公布日期 2002.04.04
申请号 WO2000SG00161 申请日期 2000.09.29
申请人 ASM TECHNOLOGY SINGAPORE PTE LTD.;WONG, YAM, MO;JIANG, LU;TAN, BOON, KHWAY;HU, GUOSHEN;ZHU, HONG, HAI;KWAN, KA, SHING, KENNY;WANG, YI, BIN 发明人 WONG, YAM, MO;JIANG, LU;TAN, BOON, KHWAY;HU, GUOSHEN;ZHU, HONG, HAI;KWAN, KA, SHING, KENNY;WANG, YI, BIN
分类号 H01L21/00;H01L21/60;(IPC1-7):H01L21/60 主分类号 H01L21/00
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