发明名称 |
POROUS GETTER DEVICES WITH REDUCED PARTICLE LOSS AND METHOD FOR THEIR MANUFACTURE |
摘要 |
<p>A method for reducing the loss of particles form the surface of porous getter bodies, consisting in producing on this surface a thin layer (20) of a metal or metal alloy with a deposition technique selected among evaporation, deposition from arc generated plasma , deposition form ionic beam and cathodic deposition.</p> |
申请公布号 |
WO0227058(A1) |
申请公布日期 |
2002.04.04 |
申请号 |
WO2001IT00488 |
申请日期 |
2001.09.25 |
申请人 |
SAES GETTERS S.P.A.;CONTE, ANDREA;MORAJA, MARCO |
发明人 |
CONTE, ANDREA;MORAJA, MARCO |
分类号 |
B01J20/02;B22F3/11;C22C1/04;C22C14/00;C22C16/00;C23C4/08;C23C4/12;C23C14/14;C23C14/16;C23C14/24;C23C14/34;C23C14/46;F04B37/04;H01J7/18;(IPC1-7):C23C14/16 |
主分类号 |
B01J20/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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