| 摘要 |
A vehicle for transporting semiconductor devices is provided, that allows to serve the loadports (2) of semiconductor processing tools (1) with device carriers (5) like a portal hoist (4) from the top. Thereby, the vehicle comprises an empty inner space (10) and an open front side, such that the loadport (2) is enclosed by the vehicle, when it approaches and docks to the loadport (2). Time for loading is shortened, complexity of structure and procedure is reduced and cleanroom space is saved.
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