CONTROLLING BIREFRINGENCE IN AN OPTICAL WAVEGUIDE AND IN AN ARRAYED WAVEGUIDE GRATING

摘要

A method of controlling birefringence in a rib waveguide structure manufactured in silicon (1), the rib waveguide structure comprising an elongated rib element (4) having an upper face and two side faces, the method comprising forming a layer of thermal oxide (7) to a predetermined thickness on said upper face and side faces of at least a portion of said rib waveguide structure.