| 摘要 |
A method of producing a vacuum container, comprising a semiconductor substrate(21) e.g. silicon layer, coupled to the upper side of a base layer (20) e.g glass layer, after the substrate is processed, a lid (22) material is anode-coupled to the substrate in a spot pattern. After this, the substrate and lid material are wholly anode-coupled to each other to for a laminate. The laminate, including the base, the substrate and lid material are divided and separated into predetermined individual areas, thus forming cavities in a vacuum container. |
