发明名称 METHOD OF ATTACHING LAYER MATERIAL AND FORMING LAYER IN PREDETERMINED PATTERN ON SUBSTRATE USING MASK
摘要 PURPOSE: Method of attaching layer material and forming layer in predetermined pattern on substrate using mask are provided to achieve a method of attaching a layer material, such as an emissive material, onto a predetermined position of a substrate with a high precision to form a layer in a desired pattern without generating a scar with a mask and the like. CONSTITUTION: A method of forming an individually patterned layer in a plurality of regions of a substrate, comprises the steps of disposing, between the substrate and a layer material source, a mask(100) including an opening corresponding to one or more of the plurality of regions where the layer is formed, and causing relative movement between the mask and the layer material source, and the substrate, and causing a material scattered from the layer material source to attach to the substrate through the opening, thereby forming the individually patterned layer.
申请公布号 KR20020025760(A) 申请公布日期 2002.04.04
申请号 KR20010059939 申请日期 2001.09.27
申请人 SANYO ELECTRIC CO., LTD. 发明人 YAMADA TSUTOMU;YONEDA KIYOSHI
分类号 H05B33/10;C23C14/04;G09F9/00;G09F9/30;H01L27/32;H01L51/00;H01L51/30;H01L51/40;H01L51/50;H01L51/56;H05B33/12 主分类号 H05B33/10
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