AUTOMATIC REFILL SYSTEM FOR ULTRA PURE OR CONTAMINATION SENSITIVE CHEMICALS
摘要
<p>A highly reliable and safe, modular automatic refill (bulk delivery) system for ultra-high purity pyrophoric metalorganic chemicals employing: a manifold that insures contamination-free operation; a liquid-level detection system (54, 56) with fail-safe redundancy; and an evacuation system (78) which leaves the system's manifold and transfer lines relatively free of chemical fire hazards; leaves them free of oxygen contamination; and leaves the composition of the system's carrier gas unaffected, between refills.</p>
申请公布号
WO0212780(B1)
申请公布日期
2002.04.04
申请号
WO2001US23993
申请日期
2001.07.31
申请人
ARCH SPECIALTY CHEMICALS, INC.
发明人
BLATT, CHRISTOPHER, S.;PEARCE, RICHARD, H.;WILLIAMS, GRAHAM;WENTWORTH, EDWARD, H., III
