Verfahren zur Verbesserung der Bildqualität und zur Erhöhung der Schreibgeschwindigkeit bei Belichtung lichtempfindlicher Schichten

摘要

The invention relates to a method for exposure without a mask for structuring light-sensitive layers on an object. According to the invention, structural elements are configured on the light-sensitive layer using a light source by irradiating a variable image-forming element with a corresponding lens system to a predetermined exposure dose (nominal exposure dose), said image-forming element functioning as a surface light modulator. Individual structural elements, groups of structural elements or parts thereof are reproduced on the light-sensitive layer according to the image fields generated by the image-forming element as a result of its respective control state, the nominal exposure dose being divided between several exposure operations and the exposure dose for the individual exposure operations being chosen in such a way that starting from a predetermined minimum exposure dose, the exposure dose is increased for each exposure operation compared to the one before. The exposure dose for the last exposure process is more than 50 % of the nominal exposure dose.