| 发明名称 |
Surface structure for vacuum treatment apparatus |
| 摘要 |
A member made of glass, ceramics, a metal or the like which is used in vacuum in a vacuum treatment chamber is located in an inert gas atmosphere and an arc spray film of a metal is formed on a surface of the member by arc spraying the metal using an inert gas as a blowing gas. Argon gas is used as the inert gas and a member for a vacuum apparatus such a vacuum vessel is considered as the member made of glass, ceramics, a metal or the like.
|
| 申请公布号 |
US2002038690(A1) |
申请公布日期 |
2002.04.04 |
| 申请号 |
US20010966077 |
申请日期 |
2001.10.01 |
| 申请人 |
SHINKUU YAKIN KABUSHIKI KAISHA (ALSO TRADING AS VACUUM METALLURGICAL CO., LTD.) |
发明人 |
MINATO MICHIO;IWAMOTO HIDEO |
| 分类号 |
C23C14/00;C03C17/09;C04B41/45;C04B41/81;C23C4/00;C23C4/12;C23C16/44;H01L21/203;H01L21/205;(IPC1-7):C23F1/02;C23C16/00 |
主分类号 |
C23C14/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
