Method of manufacturing a mirror structure

摘要

Optical cross-connect systems (100) involve the general concept of a two dimensional array (104) of microelectromechanical systems (MEMS) tilt mirrors (106) being used to direct light coming from a first optical fiber (110) to a second optical fiber (111). Each MEMS tilt mirror (106) in the two dimensional array (104) can tilt about two non-colinear axes (x,y) and is suspended by a plurality of suspension arms (450) attached to a substrate. <IMAGE>