发明名称 SEMICONDUCTOR DEVICE FOR PREVENTING CHARACTERISTIC DETERIORATION OF ELECTROSTATIC DISCHARGE PROTECTION DEVICE DUE TO FORMATION OF SILICIDE AND METHOD FOR FABRICATING THE SAME
摘要 PURPOSE: A semiconductor device for preventing characteristic deterioration of an electrostatic discharge protection device due to formation of a silicide and a method for fabricating the same are provided to perform a silicide formation process without forming a silicide formation prevention layer on a drain region of a transistor. CONSTITUTION: An insulating layer pattern(I1) is formed selectively on a semiconductor substrate. A gate electrode(G) is formed on the semiconductor substrate. A source region(S) and a drain region(D) are formed within the semiconductor substrate of both ends of the gate electrode(G). A silicide formation process is performed under an exposing state of an electrostatic discharge protection device. Accordingly, a degradation phenomenon of a semiconductor device is prevented by forming the insulating layer(I1) before a transistor fabricating process is completed.
申请公布号 KR20020024934(A) 申请公布日期 2002.04.03
申请号 KR20000056782 申请日期 2000.09.27
申请人 HYNIX SEMICONDUCTOR INC. 发明人 JUNG, JONG CHEOK
分类号 H01L27/04;(IPC1-7):H01L27/04 主分类号 H01L27/04
代理机构 代理人
主权项
地址