发明名称 |
SEMICONDUCTOR DEVICE FOR PREVENTING CHARACTERISTIC DETERIORATION OF ELECTROSTATIC DISCHARGE PROTECTION DEVICE DUE TO FORMATION OF SILICIDE AND METHOD FOR FABRICATING THE SAME |
摘要 |
PURPOSE: A semiconductor device for preventing characteristic deterioration of an electrostatic discharge protection device due to formation of a silicide and a method for fabricating the same are provided to perform a silicide formation process without forming a silicide formation prevention layer on a drain region of a transistor. CONSTITUTION: An insulating layer pattern(I1) is formed selectively on a semiconductor substrate. A gate electrode(G) is formed on the semiconductor substrate. A source region(S) and a drain region(D) are formed within the semiconductor substrate of both ends of the gate electrode(G). A silicide formation process is performed under an exposing state of an electrostatic discharge protection device. Accordingly, a degradation phenomenon of a semiconductor device is prevented by forming the insulating layer(I1) before a transistor fabricating process is completed.
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申请公布号 |
KR20020024934(A) |
申请公布日期 |
2002.04.03 |
申请号 |
KR20000056782 |
申请日期 |
2000.09.27 |
申请人 |
HYNIX SEMICONDUCTOR INC. |
发明人 |
JUNG, JONG CHEOK |
分类号 |
H01L27/04;(IPC1-7):H01L27/04 |
主分类号 |
H01L27/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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