Mirror structure

摘要

Optical cross-connect systems (100) involve the general concept of a two dimensional array (104) of microelectromechanical system (MEMS) tilt mirrors (106) being used to direct light coming from a first optical fiber (110) to a second optical fiber (111). Each MEMS tilt mirror (106) in the two dimensional array (104) can be tilted about two non-colinear axes and is suspended by a plurality of suspension arms (450) attached to a silicon on insulator substrate. Each of the plurality of suspension arms (450) comprises a layer with a built-in stress gradient deposited thereon which serves to automatically raise the MEMS tilt mirrors (106) during a release etch in the fabrication phase.