DEVICE FOR MONITORING INTENDED OR UNAVOIDABLE LAYER DEPOSITS AND CORRESPONDING METHOD,申请号EP20000954289-传众专利搜索

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发明名称	DEVICE FOR MONITORING INTENDED OR UNAVOIDABLE LAYER DEPOSITS AND CORRESPONDING METHOD
摘要
申请公布号	EP1192291(A1)	申请公布日期	2002.04.03
申请号	EP20000954289	申请日期	2000.06.28
申请人	FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.;INFINEON TECHNOLOGIES SC300 GMBH & CO. KG	发明人	ZIEGLER, JUERGEN;WALLER, REINHOLD;PFITZNER, LOTHAR;SCHNEIDER, CLAUS;RYSSEL, HEINER;TEGEDER, VOLKER
分类号	C23C14/54;C23C16/44;C23C16/52;G01B11/06;H01J37/32;H01L21/205;H01L21/302;H01L21/3065;H01L21/66;(IPC1-7):C23C14/54	主分类号	C23C14/54
代理机构		代理人
主权项
地址

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