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经营范围
发明名称
Plasma processing apparatus
摘要
申请公布号
GB0203452(D0)
申请公布日期
2002.04.03
申请号
GB20020003452
申请日期
2002.02.14
申请人
TRIKON HOLDINGS LIMITED
发明人
分类号
C23C14/34;C23C14/56;H01J37/32;H01J37/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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