| 摘要 |
<p>A compensation mechanism for correcting component fabrication and assembly deviations in component precision positioning stages utilizing a planar mounting table arranged to slide between two rails consisting of a pair of grooves disposed adjacent one edge of the table and a single groove adjacent an opposite edge of the table, a spring arrangement forming slot being provided in close proximity to opposite edge to provide spring bias of the grooves against the rails. <IMAGE></p> |
